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Optical and Electrical Properties of Indium Oxide Thin Films as Transparent Electrode to Indium Phosphide

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Abstract

We investigate the optical and electrical properties of indium oxide (In2O3) thin films deposited by ion beam assisted deposition (IAD). Results show promising potentials of In2O3 as transparent electrodes for InP based optoelectronic devices.

© 2012 Optical Society of America

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