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Fabrication of microlens arrays in polycarbonate with nanojoule energy femtosecond laser pulses

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Abstract

Microlens arrays were fabricated by focusing a high repetition rate femtosecond laser with low energy pulses inside polycarbonate samples. The microlens was imaged in a scanning electron microscope and was optically characterized using a HeNe laser. It was found that the microlens has a diameter of 80 µm, a focal length of 100 µm, a numerical apperture of 0.63 and a spot diameter of 1.2 µm. Additionally, we found that a void is created under the microlens.

© 2012 Optical Society of America

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