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Picosecond laser machining in the bulk of transparent dielectrics: critical comparison with fs-laser direct writing

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Abstract

Picosecond lasers for bulk machining of transparent dielectrics are assessed as an alternative to fs-lasers. Nanogratings and micro-channels by selective etching are demonstrated. Scattering and inhomogeneous etching are challenges yet to be solved.

© 2012 Optical Society of America

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