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Conferences > CLEOPR > 2020 > C7E > C7E_2

Fabrication of High-Q Photonic Crystal Cavities with a Bosch Etch Process

Jingda Wu, Kashif Masud Awan, Yanrong Li, Lukas Chrostowski, and Jeff F. Young

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Abstract

Photonic crystal cavities on silicon-on-insulator wafers with quality factors at 70,000 level were demonstrated using a Bosch etch process, with near-vertical sidewalls.

© 2020 The Author(s)

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