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Miniature Silicon Nanobeam Resonator Tuned by GST Phase Change Material

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Abstract

We report a silicon optical nanobeam resonator with central hole infiltrated with a thin layer of Ge2Sb2Te5 (GST) material. The resonances can be tuned when the GST changes its phases between the amorphous and crystalline states.

© 2018 The Author(s)

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