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Conferences > CLEOPR > 2018 > W3A > W3A.66

Terahertz Antireflective Structures Fabricated via Femtosecond Laser Ablation

Xi Yu, Mahiro Takeuchi, Shingo Ono, and Jongsuck Bae

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Abstract

Terahertz antireflective structures on Si substrates are fabricated by femtosecond laser processing. The structure is constituted by periodic grooves at micro order. Their antireflective characteristics are evaluated by THz-TDS (terahertz time-domain spectroscopy). The results show that the surface reflectance is almost decreased to 0 and antireflection band was widened by improving aspect ratio of grooves.

© 2018 The Author(s)

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