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Hot-wire CVD a-Si:H for low loss silicon photonic waveguides

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Abstract

We demonstrate low temperature hot-wire chemical vapor deposition of low loss a-Si:H wire waveguides. We achieved propagation loss of 0.65 dB/cm at TE polarized 1.55 μm wavelength for waveguides deposited at 230 °C.

© 2018 The Author(s)

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