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Conferences > CLEOPR > 2018 > Th3C > Th3C.4

Mid-infrared germanium photonic integrated circuits for on-chip biochemical sensing

Zhenzhou Cheng, Ting-Hui Xiao, Ziqiang Zhao, Wen Zhou, Mitsuru Takenaka, Hon Ki Tsang, and Keisuke Goda

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Abstract

We report our recent progress on mid-infrared germanium photonic integrated circuits. Specifically, a suspended-membrane waveguide, focusing subwavelength grating coupler, microring resonator, and photonic crystal nanocavities are demonstrated based on a germanium-on-insulator wafer.

© 2018 The Author(s)

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