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Conferences > CLEOPR > 2018 > Th3C > Th3C.3

Optical Waveguides by Germanium Ion Implantation on Silicon-on-Insulator Platform

Xia Chen, Milan M. Milosevic, Ali Z. Khokhar, David J. Thomson, and Graham T. Reed

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Abstract

We demonstrated a new type of integrated photonic waveguides formed by Ge ion implantation in the silicon slab on silicon-on-insulator platform. They were successfully fabricated and characterised, and can be potentially erased by laser annealing.

© 2018 The Author(s)

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