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Conferences > CLEOPR > 2018 > Th2J > Th2J.2

III-V/Si Integration Platform for Laser Diodes and Mach-Zehnder Modulators

Tatsurou Hiraki, Takuma Aihara, Koichi Hasebe, Koji Takeda, Takuro Fujii, Takaaki Kakitsuka, Tai Tsuchizawa, Hiroshi Fukuda, and Shinji Matsuo

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Abstract

We demonstrate membrane III-V/Si integrated devices. An InGaAsP/Si metal-oxide-semiconductor capacitor Mach-Zehnder modulator shows small Vπ L (0.09 Vcm), and a laser diode coupled to a 0.2- μm-thick Si waveguide shows a fiber coupled power of 4.6 mW.

© 2018 The Author(s)

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