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Optica Publishing Group
  • 2017 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2017),
  • paper s2724

Surface characterization of A Micro-patterned Sample Using Simultaneous Dual-wavelength Interferometry With Compensation Of Chromatic Aberration

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Abstract

Real-time, dual-wavelength interferometry with compensation of chromatic aberration is achieved practically using two identical CCD cameras and bandpass filters for accurate surface micro-topography measurement.

© 2017 Optical Society of America

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