Abstract
Galvanometric laser scanning technology is widely used in the field of laser processing, In order to obtain a good processing quality, the laser beam must be small and uniform on the entire working surface. Due to the error of the out of focus , the traditional laser focusing system focus on the curved surface, the more deviation from the focus center, the spot is more divergent, seriously affecting the quality of the focus. In order to solve the above problems,Usually adopt dynamic focusing optical system to compensate defocus error,Different from the proposed three lenses focusing system, this paper puts forward a creative and simplified two lenses focusing system , which uses the principle of the optical lever to compensate the deviation of the deviation. The combined focal length formula were theoretically analyzed in this paper, through the simulation of zemax and experiment verify the feasibility.within the range of the working space of 400mm*400mm, the face center position of focusing diameter for 0.390mm, edge radius for 0.432mm, meets the requirements of laser processing. Key words: laser scanning, dynamic focusing, out of focus error, optical design
© 2017 Optical Society of America
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