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Conferences > CLEOPR > 2015 > 27I2 > 27I2_3
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 27I2_3

Optical Detection of Micro defect by single-pixel imaging

K. Shibuya, Y. Mizutani, H. Yamamoto, T. Yasui, and T. Iwata

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Abstract

We propose an optical detection method of micro defect by single-pixel imaging microscopy. Our results demonstrate the micro defect imaging by detecting an anisotropic scattered light on mirror surface.

© 2015 IEEE

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