Displacement measurement by Single-grating heterodyne Interferometry

Shuhua Yan; Guochao Wang; Cunbao Lin; Yukun Luo

2015 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2015),
paper 26F3_6

Displacement measurement by Single-grating heterodyne Interferometry

Shuhua Yan, Guochao Wang, Cunbao Lin, and Yukun Luo

Conference on Lasers and Electro-Optics/Pacific Rim 2015

Busan Republic of Korea
24–28 August 2015
ISBN: 978-1-4673-7110-0

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Optical Metrology and Sensing VI (26F3)

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S. Yan, G. Wang, C. Lin, and Y. Luo, "Displacement measurement by Single-grating heterodyne Interferometry," in 2015 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2015), paper 26F3_6.

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Abstract

We presented a displacement measurement system based on single-grating heterodyne interferometry. Our prototype system was demonstrated to achieve a relative measurement accuracy of better than 69 nm with standard deviations of less than 28 nm.

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