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Conferences > CLEOPR > 2015 > 26D3 > 26D3_4
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 26D3_4

Material Response of Semiconductors Irradiated with IR Ultrashort Laser Pulses

Ilya Mingareev, Mark Ramme, and Martin Richardson

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Abstract

We utilize near- and mid-IR ultrafast laser radiation to investigate the processing of crystalline silicon with different dopants. A numerical model is adopted to simulate the material response depending on the wavelength and the dopant concentration.

© 2015 IEEE

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