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Conferences > CLEOPR > 2015 > 25J3 > 25J3_5
  • 2015 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2015),
  • paper 25J3_5

Raman analysis of in-plane biaxial strain for Ge-on-Si lasers

Bugeun Ki, Jiwoong Baek, Chulwon Lee, Yong-Hoon Cho, and Jungwoo Oh

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Abstract

Tensile strain of Ge-on-Si with post-growth annealing was analyzed using micro-Raman for optical sources in interconnection system. Tensile Stain in epi-Ge distributed non-linearly with SiGe alloy formation at the interface after annealing.

© 2015 IEEE

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