Dimensional Metrology for Smart Devices using the Optical Comb of Femtosecond Pulse Lasers

Jonghan Jin; Jonghan Jin; Jungjae Park; Jong-Ahn Kim; Jaewan Kim; Jaewan Kim

2015 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2015),
paper 25F2_2

Dimensional Metrology for Smart Devices using the Optical Comb of Femtosecond Pulse Lasers

Jonghan Jin, Jungjae Park, Jong-Ahn Kim, and Jaewan Kim

Conference on Lasers and Electro-Optics/Pacific Rim 2015

Busan Republic of Korea
24–28 August 2015
ISBN: 978-1-4673-7110-0

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Optical Metrology and Sensing II (25F2)

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J. Jin, J. Park, J. Kim, and J. Kim, "Dimensional Metrology for Smart Devices using the Optical Comb of Femtosecond Pulse Lasers," in 2015 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2015), paper 25F2_2.

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Abstract

We have proposed the dimensional metrological methods for smart devices using the optical comb of a femtosecond pulse laser. For precision and high speed measurements, these methods were realized based on spectral-domain interferometry.

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