Add to BibSonomyAbstract
Coherent EUV light at 13.5 nm was generated by high-harmonic generation using a 35-fs pulsed laser at 796 nm in Ne gas, which showed stable operation within 5% deviation over an hour.
© 2015 IEEE
PDF ArticleMore Like This
Actinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic Generation
Yong Soo Kim, June Park, Han Yong Park, Hamin Sung, Jomsool Kim, Seung Beom Lee, Hyun Woo Cho, Ju Han Lee, Min-Chul Park, and Young Min Jhon
26F2_4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2015
The First Commercial Table-Top Coherent EUV Sources for Metrology and Imaging Applications
Xiaoshi Zhang, Sterling J. Backus, Christopher Wood, and Henry Kapteyn
ET5A.2 Compact EUV & X-ray Light Sources (EUVXRAY) 2016
Metrology Sources for EUV Lithography
Steve Horne, Paul Blackborow, Matthew M. Bensen, Matthew J. Partlow, Deborah Gustafson, and Michael Goldstein
JW1D.3 CLEO: Applications and Technology (CLEO:A&T) 2013