Add to BibSonomyAbstract
In this presentation, we propose and verify a simple combined interferometer with low coherence scanning interferometry and spectrally-resolved interferometry using NIR SLD to measure both side surface and thickness profiles of a Si wafer at once.
© 2013 IEICE
PDF ArticleMore Like This
Measuring the wafer thickness and refractive index by spectral interferometry of optical frequency comb
Shilin Xiong, Yuetang Yang, and Guanhao Wu
C10F_3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2020
Dual low coherence scanning interferometer for rapidly measuring large step height and thickness
Jun Woo Jeon, Hyo Mi Park, and Ki-Nam Joo
W3A.135 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2018
Noisy Quantum Metrology, Optical Interferometry, and the Time Duration of Physical Processes
Bruno M. Escher, Marcio M. Taddei, Nicim Zagury, Ruynet. L. de Matos Filho, and Luiz Davidovich
T5A.1 Conference on Coherence and Quantum Optics (CQO) 2013