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Conferences > CLEOPR > 2013 > WPF > WPF_15
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WPF_15

Multi-frequency Light Source Using Spatial Light Modulator for Profilometry

Samuel Choi, Shunsuke Takatsuka, Osami Sasaki, and Takamasa Suzuki

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Abstract

A multi-frequency light source with a spatial light modulator that generated a broadband spectrum with variable interval and center frequency was demonstrated. It can carry out the arbitrary multi-frequency scan for interferometric profile measurement.

© 2013 IEICE

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