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Conferences > CLEOPR > 2013 > WPE > WPE_5
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WPE_5

Effect of Superimposed Multiple Shots of Femtosecond Laser Pulses on Periodic Surface Nanoablation

G. Miyaji and K. Miyazaki

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Abstract

Pump-probe reflectivity measurements have shown that the multiple shots of low-fluence femtosecond laser pulses on silicon accumulate non-thermal bonding structure change to decrease ablation threshold and subsequently excite surface plasmon polaritons for periodic nanoscale ablation.

© 2013 IEICE

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