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Optica Publishing Group
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WPE_10

Control of microstructures by two interfered femtosecond laser pluses using biprism

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Abstract

Periodic microgrooves on Si wafer induced by interfered femtosecond laser pluses using biprism are reported. Shape of microstructures is controlled by laser fluence, scanning numbers, and base angle of biprism. Tribological property changes by microgrooves.

© 2013 IEICE

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