We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.

© 2013 IEICE

PDF Article
More Like This
Micromachining of Polydimethylsiloxane using EUV light

Shintaro Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, and Koichi Murakami
WPE_2 Conference on Lasers and Electro-Optics/Pacific Rim (CLEOPR) 2013

Polarization dependent femtosecond laser ablation of PMMA – role of light-plasma interaction

A. Villafranca, K. Popov, J-M. Guay, F. Baset, L. Ramunno, and V.R. Bhardwaj
JTh4I.2 CLEO: Applications and Technology (CLEO_AT) 2012

Laser Produced Plasma Light Sources for EUV Lithography

Bruno La Fontaine
AFA4 Conference on Lasers and Electro-Optics: Applications (CLEO_Apps) 2010


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription