Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WPE_1

Ablation Process of PMMA Induced by Irradiation with Laser Plasma EUV Light

Not Accessible

Your library or personal account may give you access

Abstract

We have investigated ablation process of PMMA induced by irradiation with laser plasma EUV light. Appling the technique, micro-structured mold can be fabricated by transferring structures of the master PMMA plate.

© 2013 IEICE

PDF Article
More Like This
Micromachining of Polydimethylsiloxane using EUV light

Shintaro Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, and Koichi Murakami
WPE_2 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2013

Polarization dependent femtosecond laser ablation of PMMA – role of light-plasma interaction

A. Villafranca, K. Popov, J-M. Guay, F. Baset, L. Ramunno, and V.R. Bhardwaj
JTh4I.2 CLEO: Applications and Technology (CLEO:A&T) 2012

Laser Produced Plasma Light Sources for EUV Lithography

Bruno La Fontaine
AFA4 Conference on Lasers and Electro-Optics: Applications (CLEO:A&T) 2010

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.