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Conferences > CLEOPR > 2013 > WH4 > WH4_6
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper WH4_6

Characterization of Boron Nitride Thin Films

M. Chubarov, H. Pedersen, H. Högberg, S. Filippov, JAA Engelbrecht, J. O’Connel, and A. Henry

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Abstract

Rhombohedral Boron Nitride layers were grown on sapphire substrate in a hot-wall CVD reactor. The characterization of those layers is reported and the results are discussed in correlation with the various growth parameters used.

© 2013 IEICE

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