Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS

Y. Bellouard

2013 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2013),
paper WE1_1

Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS

Y. Bellouard

Conference on Lasers and Electro-Optics/Pacific Rim 2013

Kyoto Japan
30 June–4 July 2013
ISBN: 978-1-4673-6475-1

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Biochip Fabrication by Femtosecond Laser I (WE1)

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Y. Bellouard, "Femtosecond Laser Processing of Active and Passive Devices for bio-MEMS," in 2013 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2013), paper WE1_1.

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Abstract

Femtosecond laser processing of glass has been proven to be an efficient tool for fabricating waveguides and micro-channels. Here we show that monolithic integration in bio-Micro-Electro-Mechanical-Systems can be pushed forward by introducing additional functionalities.

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