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  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuPH_10

Hydrogen Environment Anisotropic Thermal Etching (HEATE) of GaN for the Fabrication of High-Aspect Nanostructure

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Abstract

High temperature hydrogen etching properties of (0001) GaN under various hydrogen pressures and temperature was systematically investigated. We found a specific selective etching condition with high-anisotropy which applicable for the fabrication of high-aspect nanostructures.

© 2013 IEICE

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