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  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuF2_3

Precision Surface Profile Measurements by Comb-based Multi-wavelength Interferometry

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Abstract

Precision measurement of large-stepped surface profiles is demonstrated using the frequency comb of a femtosecond pulse laser. Four optical wavelengths are selected out of the frequency comb to realize the principle of multi-wavelength Interferometry with traceability to the Rb atomic clock of time/frequency standard. A large step-height of -70 μm is exemplarily measured with nanometre precision with the maximum measurable height being extended to tens of mm.

© 2013 IEICE

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