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Conferences > CLEOPR > 2013 > TuE1 > TuE1_5
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper TuE1_5

Monolithic Integration of Microelectric Components and Microfluidic Structures in Glass Using Femtosecond Laser

Jian Xu, Dong Wu, Sizhu Wu, Koji Sugioka, and Katsumi Midorikawa

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Abstract

Microelectric components and microfluidic structures are monolithically integrated in a glass substrate by a femtosecond laser. The fabricated microchips are used as microheaters to control the temperature of in-channel fluids.

© 2013 IEICE

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