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Conferences > CLEOPR > 2013 > MM2 > MM2_4
  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper MM2_4

Er Silicate Waveguides for On-Chip Optical Amplifiers

H. Isshiki

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Abstract

Er silicates waveguides for on-chip optical amplifiers are reviewed. The structure and the fabrication process are discussed. Directed self-assembly (DSA) process using radical assisted sputter (RAS) is promising method for the integration of Er silicates amplifier waveguide. Preliminary results on the gain property of the waveguide using Si photonic crystal slot are shown.

© 2013 IEICE

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