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  • 2013 Conference on Lasers and Electro-Optics Pacific Rim
  • (Optica Publishing Group, 2013),
  • paper MM1_7

Amorphous Si waveguides with high-quality stacked gratings for multi-layer Si optical circuits

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Abstract

Amorphous Si wire waveguides with stacked gratings are successfully fabricated by carefully controlling the SOG coating thickness. The peak energy of the light from the waveguide is controlled to be just 1.55 μm as designed.

© 2013 IEICE

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