Abstract

We report rapid fabrication of very high aspect (>400:1) micro/nano-channels on the front surface of a glass substrate by use of cylindrical lenses and a low cost, high-NA, aspheric lens to focus a single 100 μJ, 100-femtosecond laser pulse to a narrow line (~1 μm × 500 μm) near that surface. Slicing of deep trenches that are ~1 μm wide and >400 μm long is achieved by line-focusing laser pulses near the back surface of the substrate. Use of line focusing for femtosecond laser machining is expected to have a number of applications, including rapid fabrication of microfluidic devices and waveguides.

© 2011 AOS