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Conferences > CLEOPR > 2011 > NPD > C171
  • Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011
  • (Optica Publishing Group, 2011),
  • paper C171

Micromechanically Tuned Ring Resonator in Silicon on Insulator

L. J. Kauppinen, S. M. C. Abdulla, M. Dijkstra, M. J. de Boer, E. Berenschot, G. J. M. Krijnen, M. Pollnau, and R. M. de Ridder

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Abstract

Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring is tuned over a 120 pm wavelength range by applying 9 V, without affecting its Q-factor.

© 2011 AOS

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