Abstract

We present high-efficient Green’s function method based on expansion in terms of spherical harmonics to investigate the optical properties of periodically or randomly distributed spherical metallic particles on a substrate. This allows numerical solutions that match with the boundary conditions at the spherical surface and at the substrate interface. Hence the optical properties can be described more precisely especially for the contribution from the spherical boundaries in comparison with previous results obtained by finite-element Green’s function method (FEGFM) with cylindrical functions and rigorous-coupled-wave analysis (RCWA). Furthermore, the calculated ellipsometry parameters (Ψ and Δ) with this method are compared with experimental results obtained by using the spectroscopic ellipsometry (SE) measurements.

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