Scanless Profilometry by means of VIPA Installed Optical Interferometer

Takashi MORISAKI; Hiroshi ONO; Tatsutoshi SHIODA

Conference on Lasers and Electro-Optics/Pacific Rim 2009
(Optica Publishing Group, 2009),
paper WE2_3

Scanless Profilometry by means of VIPA Installed Optical Interferometer

Takashi MORISAKI, Hiroshi ONO, and Tatsutoshi SHIODA

Conference on Lasers and Electro-Optics/Pacific Rim 2009

Shanghai China
30 August–3 September 2009
ISBN: 978-1-4244-3830-3

From the session
Optical Frequency Comb (WE2)

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T. MORISAKI, H. ONO, and T. SHIODA, "Scanless Profilometry by means of VIPA Installed Optical Interferometer," in Conference on Lasers and Electro-Optics/Pacific Rim 2009, (Optica Publishing Group, 2009), paper WE2_3.

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Abstract

A VIPA installed optical interferometer for scanless profilometry is proposed by displaying the applied delay time to a line-image sensor. The delay time was carried on spatially separated combs generated by the VIPA.

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