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Conferences > CLEOPR > 2009 > TUP > TUP8_11
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP8_11

Woodpile Photonic Crystal Nanocavity by Two-directional Etching without Wafer Bonding

Lingling Tang and Tomoyuki Yoshie

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Abstract

Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.

© 2009 IEEE

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