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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP6_36

Minimal continuous thickness and microstructure of Mo thin films

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Abstract

The minimal continuous thickness of Mo film was obtained. Microstructure analysis shows the characteristics peak increases sharply and RMS surface roughness reaches its maximum when thickness approaches the minimal continuous thickness. RMS then decreases rapidly.

© 2009 IEEE

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