The minimal continuous thickness of Mo film was obtained. Microstructure analysis shows the characteristics peak increases sharply and RMS surface roughness reaches its maximum when thickness approaches the minimal continuous thickness. RMS then decreases rapidly.

© 2009 IEEE

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription