Abstract
Theoretical analysis of impact of illumination profile on measurement accuracy is given. A novel measurement technique using Alt-PSM marks under dipole illumination is proposed based on the analysis result.
© 2009 IEEE
PDF ArticleTheoretical analysis of impact of illumination profile on measurement accuracy is given. A novel measurement technique using Alt-PSM marks under dipole illumination is proposed based on the analysis result.
© 2009 IEEE
PDF Article