Abstract

The selective and large area laser cleaning of thin films deposited on sapphire substarte was experimentally investigated. The parameters are optimized for efficient cleaning and the samples were analyzed through SEM and AFM.

© 2009 IEEE

PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription