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Conferences > CLEOPR > 2009 > TUP > TUP13_8
  • Conference on Lasers and Electro-Optics/Pacific Rim 2009
  • (Optica Publishing Group, 2009),
  • paper TUP13_8

Investigation on Laser cleaning of thin films deposited on Sapphire

I.A. Palani, A. Kumeda, T. Matsumoto, M. Higashihata, and T. Okada

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Abstract

The selective and large area laser cleaning of thin films deposited on sapphire substarte was experimentally investigated. The parameters are optimized for efficient cleaning and the samples were analyzed through SEM and AFM.

© 2009 IEEE

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