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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper WP_130

Two-Wavelength Snap-Shot Interferometer for Disturbance-Free Step-Height Measurement

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Abstract

Two-wavelength interferometer that is applicable to step-height measurement under the large disturbance is proposed and demonstrated. A step-height of 2 µm was measured for the high-speed rotating object without any special devices. The applicable rotating speed reached over 1000 rpm in our demonstration.

© 2007 IEEE

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