Abstract
Ultrafast laser ablation of silicon and metal was investigated as a function of temperature. The ablation efficiency is slightly enhanced with an apparent decrease in ablation threshold and surface roughness at a high substrate temperature.
© 2007 IEEE
PDF ArticleMore Like This
J. S. Yahng and S. C. Jeoung
JThD92 Conference on Lasers and Electro-Optics (CLEO:S&I) 2007
Vahan Malkhasyan, Mohamed Assoul, and Guy Monteil
ATu4K.2 CLEO: Applications and Technology (CLEO:A&T) 2016
Katsuya Oguri, Yasuaki Okano, Tadashi Nishikawa, and Hidetoshi Nakano
CThA3 Conference on Lasers and Electro-Optics (CLEO:S&I) 2007