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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper WP_029

Electrical characterization of AIN/Si(111) interface

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Abstract

This work investigates the interface of A1N/Si(111) by Hall and thermal electrical measurement. The results show that a p-type conducting layer was unintentionally formed at the interface.

© 2007 IEEE

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