Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEOPR > 2007 > WP > WP_004
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper WP_004

Debris characteristics of a laser-produced plasma extreme ultraviolet emission source using a colloidal tin dioxide nano-particle jet target

Masanori Kaku, Sumiyoshi Suetake, Yusuke Senba, Yusuke Sato, Masahito Katto, and Shoichi Kubodera

Not Accessible

Your library or personal account may give you access

Abstract

Characteristics of emitted particles from a laser-produced tin plasma using a colloidal tin dioxide nano-particle jet target were investigated. By using double laser pulses, the EUV conversion efficiency at 13.5 nm and the ion energy were simultaneously regulated. Deposited amount of tin oxide was not well controlled, however.

© 2007 IEEE

PDF Article
More Like This
Production of Sn-Droplets as a Target of Laser-Produced Plasma for Debris-Free EUV Light Source

Koji Tamaru, Daisuke Nakamura, Akihiro Takahashi, and Tatsuo Okada
TuA3_4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007

Solid-State-Laser-Produced Microdroplet-Tin Plasma Sources of Extreme Ultraviolet Radiation

L. Behnke, R. Schupp, Z. Bouza, J. Scheers, J. Sheil, R. Hoekstra, W. Ubachs, and O.O. Versolato
EF2A.2 Compact EUV & X-ray Light Sources (EUVXRAY) 2020

Research of the CO2 laser produced tin plasma and its extreme ultraviolet emission

Wang Xinbing, Zuo DouLuo, Lu Peixiang, and Wu Tao
MF2A.2 Laser and Tera-Hertz Science and Technology (LTST) 2012

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use