Abstract
Characteristics of emitted particles from a laser-produced tin plasma using a colloidal tin dioxide nano-particle jet target were investigated. By using double laser pulses, the EUV conversion efficiency at 13.5 nm and the ion energy were simultaneously regulated. Deposited amount of tin oxide was not well controlled, however.
© 2007 IEEE
PDF ArticleMore Like This
Koji Tamaru, Daisuke Nakamura, Akihiro Takahashi, and Tatsuo Okada
TuA3_4 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007
L. Behnke, R. Schupp, Z. Bouza, J. Scheers, J. Sheil, R. Hoekstra, W. Ubachs, and O.O. Versolato
EF2A.2 Compact EUV & X-ray Light Sources (EUVXRAY) 2020
Wang Xinbing, Zuo DouLuo, Lu Peixiang, and Wu Tao
MF2A.2 Laser and Tera-Hertz Science and Technology (LTST) 2012