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  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper WG1_5

Surface mapping of 2-D opaque microscopic objects via forward shadow diffraction

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Abstract

We have found that the angular width between two adjacent local minima on the forward diffraction pattern of an opaque convex object is inversely proportional to the projection width of the object in that diffraction direction. Based on this finding we have developed a nondestructive two-dimensional surface mapping technique with a 20-nm resolution.

© 2007 IEEE

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