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  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper WE1_1

Three-dimensional metal microfabrication technique by using two-photon reduction

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Abstract

We propose micro-fabrication technique that enables us to obtain arbitrary 3D micro/nano metallic structures by scanning the laser beam spot in three dimensions. The spatial resolution and the electrical conductivity of the fabricated structures are discussed.

© 2007 IEEE

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