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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper TuF3_4

The application of optical coherence tomography for monitoring of the laser marking performance

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Abstract

We have demonstrated the utility of optical coherence tomography (OCT) as a nondestructive diagnostic tool to evaluate the laser marking performance. The pit formed at different laser marking conditions was imaged by using conventional scanning electron microscope and OCT. OCT images verified feasibility and potential for monitoring of laser processing.

© 2007 IEEE

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