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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper TuD4_6

Fabrication of Micron-scale Elliptical Structures for Vertical Optical Via Applications

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Abstract

Previously proposed shape of the optical via structures are simple 45 degree mirrors with or without metal coatings, and simple elliptical shapes. To improve alignment tolerance and coupling efficiency, various shape of the optical via structures are fabricated and optical characteristics of the shapes are measured.

© 2007 IEEE

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