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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper TuB2_3

Micromachining of Grooves for Cutting Fused Silica Plates with Femtosecond Laser Pulses

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Abstract

Micromachining of grooves and their morphologies for cutting fused silica plates are reported in this paper. A femtosecond laser (pulse width: 172 fs, wavelength: 780 nm, and repetition rate: 1 kHz) is used to machine grooves. Ablations are investigated varying pulse energies, scanning speeds and number of consecutive passes.

© 2007 IEEE

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