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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper TuA3_4

Production of Sn-Droplets as a Target of Laser-Produced Plasma for Debris-Free EUV Light Source

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Abstract

A new metal droplet generator is proposed and tested. In this study, Sn droplets are generated for an laser-produced plasma extreme-ultraviolet light source at 13.5 nm that is used in the next generation optical lithography system. The droplet generator can produce Sn droplets as small as 15 μm on demand.

© 2007 IEEE

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