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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThP_082

Rapid formation of block copolymer thin film based on infrared laser irradiation

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Abstract

A fast and reliable nanofabrication process to prepare thin films of diblock copolymer is essential for enabling their applications in microelectronics. We present a novel technique of shortening self-assembled time significantly by direct exposing diblock copolymer films to a pulsed CO2 laser light.

© 2007 IEEE

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