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  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThP_035

Enhanced light emission from InP substrate with nanoholes

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Abstract

We observed a significant enhancement in the light output from nanoholes on InP substrate covered with nanoporous alumina mask. The substrate was exposed in ambient gases by inductively coupled plasma reactive ion etching. Photoluminescence (PL) spectra of the substrate with alumina mask showed 4 times enhanced signal compared with that of a raw InP substrate.

© 2007 IEEE

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